Desenvolvimento de um protótipo de spin coater para deposição de filmes finos

Abstract

This work consists in the development of a Spin Coater prototype, which the main components are a brushless motor, an ESC and a development kit from Texas Instruments®, composed by a Tiva™ TM4C1294 and a LCD display. Mechanical elements and a resistor divider with analog filter were projected and developed, as well as the backend and frontend programming. The velocity measurement was accomplished without sensors through the motor’s back-EMF measurement. It was proven through linear regression that the ESC controls the brushless motor’s velocity linearly, achieving a determination coefficient (R²) of 0,9997. An HMI was created through the LCD display to ease the user’s interaction with the prototype, enabling the parameter modification and operation.